Integrated simulations of hybrid discharge-laser produced plasma devices for EUV metrology
| Autor: | Valeryi A. Sizyuk, Ahmed Hassanein, Florian Melsheimer, Larissa Juschkin, Tatyana Sizyuk |
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| Rok vydání: | 2022 |
| Zdroj: | Optical and EUV Nanolithography XXXV. |
| DOI: | 10.1117/12.2614327 |
| Databáze: | OpenAIRE |
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