Simulation of Low Pressure RF Plasma Flow in Non-Local Approximation

Autor:	Viktor S. Zheltukhin, Aleksandr Yu. Shemakhin
Rok vydání:	2020
Zdroj:	2020 IEEE International Conference on Plasma Science (ICOPS).
DOI:	10.1109/icops37625.2020.9717442
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::bccaadf7315d790cf67facb80c5427cc https://doi.org/10.1109/icops37625.2020.9717442 Zobrazit plný text záznamu