Study of layered structures using modified acoustic resonator spectroscopy

Autor:	Natalia Polzikova, G.D. Mansfeld, S. G. Alekseev, Iosif Kotelyanskii
Rok vydání:	2015
Předmět:	Radiation Materials science business.industry Acoustic wave Condensed Matter Physics Network analyzer (electrical) Spectral line Electronic Optical and Magnetic Materials Wavelength Resonator Optics Deposition (phase transition) Electrical and Electronic Engineering business Spectroscopy Microwave
Zdroj:	Journal of Communications Technology and Electronics. 60:300-307
ISSN:	1555-6557 1064-2269
Popis:	A software package that makes it possible to record scans of the microwave spectrum of the high-overtone bulk acoustic resonator (HBAR) with an arbitrary frequency step in the entire range of the network analyzer is developed. Parameters (frequency and width) of several thousand resonant peaks can be obtained using the computerized processing of the scans. The proposed procedure allows an increase in the accuracy of the existing method for the measurement of the velocity of acoustic wave in material. For the layers with a thickness of several wavelengths, the method makes it possible to obtain the velocities of waves in the material under study using a single spectrum and does not require the comparison of the HBAR spectra measured prior to and after the deposition of the layer under study.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::bc973b12f7e3ec857fb78424a3bd7b1f https://doi.org/10.1134/s1064226915030018 Zobrazit plný text záznamu Full text from SpringerLink