Ozone Killer by UV-Light Irradiation for Reduced Pressure and High Concentration Ozone Gas

Autor:	Shingo Ichimura, Yoshiki Morikawa, Tetsuya Nishiguchi, Naoto Kameda, Mitsuru Kekura, Hidehiko Nonaka
Rok vydání:	2009
Předmět:	High concentration chemistry.chemical_compound Ozone chemistry Environmental chemistry Light irradiation General Materials Science Surfaces and Interfaces Instrumentation Spectroscopy
Zdroj:	Journal of the Vacuum Society of Japan. 52:245-247
ISSN:	1882-4749 1882-2398
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::bc79d04d64177c6fe7d8a329e8577ce7 https://doi.org/10.3131/jvsj2.52.245 Zobrazit plný text záznamu