Rapid cross-sectioning of challenging samples using a combination of TRUE X-sectioning and the rocking stage techniques
| Autor: | Tomas Hmcir, Marek Šikula, Pascal Gounet |
|---|---|
| Rok vydání: | 2017 |
| Předmět: |
Materials science
Ion beam business.industry chemistry.chemical_element Nanotechnology 02 engineering and technology Standard methods 010402 general chemistry 021001 nanoscience & nanotechnology Chip 01 natural sciences 0104 chemical sciences chemistry Ball grid array Optoelectronics Sample preparation Stage (hydrology) 0210 nano-technology business Tin Polyimide |
| Zdroj: | 2017 IEEE 24th International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA). |
| DOI: | 10.1109/ipfa.2017.8060168 |
| Popis: | An advanced sample preparation protocol using Xe+ Plasma FIB for cross-sections wider than 400 μm is proposed. Challenging samples such as a BGA (CSP) or chip in a package often suffer from FIB milling artifacts. The results are unsatisfactory mainly due to different milling rates of the various materials (polyimide, tin, copper), ion beam induced ripples or due to significant topography. The process parameters of the proposed approach are compared with the standard methods with respect to cross-section quality as well as preparation time. The new approach is then combined with the Rocking stage which greatly improves cross-section quality. |
| Databáze: | OpenAIRE |
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