Building a Simulation and Control System for the Process of Laser Trimming of Film Resistors in Microelectronics

Autor:	V Kopylov Andrey, V Chapkin Vyacheslav, S Seredin Oleg, V Kondrashov Vladimir, V Lukashenkov Anatoly
Rok vydání:	2018
Předmět:	Materials science business.industry law Control system Process (computing) Mechanical engineering Microelectronics Resistor business Laser trimming law.invention
Zdroj:	Nanoindustry Russia. :211-216
ISSN:	1993-8578
DOI:	10.22184/1993-8578.2018.82.211.216
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::bc4a125bea17734a4625269436d3a5f8 https://doi.org/10.22184/1993-8578.2018.82.211.216 Zobrazit plný text záznamu