In-Situ Measurement and Control of Wafer Temperature Using Micro Sensor (1st Report, An Experimental Study by Using Large Model)

Autor:	Shinichi Yokota, Kenichi Bandoh, Hideaki Ohkubo
Rok vydání:	2008
Předmět:	In situ Materials science Mechanical Engineering Mechanical engineering Industrial and Manufacturing Engineering law.invention Mechanical system Mechanics of Materials law Electronic engineering Process control Wafer Hot plate Photolithography Large model
Zdroj:	TRANSACTIONS OF THE JAPAN SOCIETY OF MECHANICAL ENGINEERS Series C. 74:1740-1748
ISSN:	1884-8354 0387-5024
DOI:	10.1299/kikaic.74.1740
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::bc2fc355e545a52253934a5aadc8ca6d https://doi.org/10.1299/kikaic.74.1740 Zobrazit plný text záznamu