Monolithic CMOS MEMS Oscillator Circuit for Sensing in the Attogram Range
| Autor: | J. Teva, Francesc Torres, Jaume Esteve, Gabriel Abadal, Jaume Verd, Arantxa Uranga, J.L. Lopez, E. Perez-Murano, Nuria Barniol |
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| Rok vydání: | 2008 |
| Předmět: |
Microelectromechanical systems
Engineering business.industry Electrical engineering Topology (electrical circuits) Integrated circuit Electronic Optical and Magnetic Materials law.invention Resonator CMOS law Q factor Optoelectronics Mechanical resonance Pierce oscillator Electrical and Electronic Engineering business |
| Zdroj: | IEEE Electron Device Letters. 29:146-148 |
| ISSN: | 0741-3106 |
| DOI: | 10.1109/led.2007.914085 |
| Popis: | This letter presents the design, fabrication, and demonstration of a CMOS/microelectromechanical system (MEMS) electrostatically self-excited resonator based on a submicrometer-scale cantilever with ~1 ag/Hz mass sensitivity. The mechanical resonator is the frequency-determining element of an oscillator circuit monolithically integrated and implemented in a commercial 0.35 mum CMOS process. The oscillator is based on a Pierce topology adapted for the MEMS resonator that presents a mechanical resonance frequency of ~6 MHz, a relative low quality factor of 100, and a large motional resistance of ~25 M. The MEMS oscillator has a frequency stability of ~1.6 Hz resulting in a mass resolution of ~1 ag (1 ag = 10-18 g in air conditions. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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