In-situ electrical property quantification of memory devices by modulated electron microscopy

Autor:	Muneyuki Fukuda, Kazuhisa Hasumi, Takashi Nobuhara, Hirohiko Kitsuki, Zhigang Wang, Kazuhiro Nojima, Yusaku Suzuki, Akira Hamaguchi, Masashi Kubo, Masaya Hosokawa
Rok vydání:	2023
Zdroj:	Metrology, Inspection, and Process Control XXXVII.
DOI:	10.1117/12.2658250
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::bc157f25260f53354f26da6761375fd8 https://doi.org/10.1117/12.2658250 Zobrazit plný text záznamu