Influence of zinc phthalocyanines on photoelectrical properties of hydrogenated amorphous silicon
| Autor: | Zhang Changsha, Xiao Hai-Bo, Peng Wenbo, Chen Jun, Wang Zhan-Guo, Liu Shiyong, Shi Mingji, Zeng Xiang-Bo, Wang Shuang-Qing |
|---|---|
| Rok vydání: | 2009 |
| Předmět: |
Amorphous silicon
Materials science Silicon business.industry Photoconductivity chemistry.chemical_element Chemical vapor deposition Condensed Matter Physics Evaporation (deposition) Electronic Optical and Magnetic Materials Vacuum evaporation chemistry.chemical_compound Surface coating chemistry Chemical engineering Plasma-enhanced chemical vapor deposition Materials Chemistry Optoelectronics Electrical and Electronic Engineering business |
| Zdroj: | Journal of Semiconductors. 30:083004 |
| ISSN: | 1674-4926 |
| DOI: | 10.1088/1674-4926/30/8/083004 |
| Popis: | Composites consisting of hydrogenated amorphous silicon (a-Si: H, inorganic) and zinc phthalocyanine (ZnPc, organic) were prepared by vacuum evaporation of ZnPc and sequential deposition amorphous silicon via plasma enhanced chemical vapor deposition (PECVD). The optical and electrical properties of the composite film have been investigated. The results demonstrate that ZnPc can endure the temperature and bombardment of the PECVD plasma and photoconductivity of the composite film was improved by 89.9% compared to pure a-Si: H film. Electron mobility-lifetime products μτ of the composite film were increased by nearly one order of magnitude from 6.96 × 10~(-7) to 5.08 × 10~(-6) cm~2/V. Combined with photoconductivity spectra of the composites and pure a-Si: H, we tentatively elucidate the improvement in photoconductivity of the composite film. |
| Databáze: | OpenAIRE |
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