Ion beam sputter deposition of layered magnetic thin films

Autor: J. W. Smits, U. Enz, R. P. van Stapele, H. A. Algra
Rok vydání: 1983
Předmět:
Zdroj: Journal of Magnetism and Magnetic Materials. 35:89-92
ISSN: 0304-8853
DOI: 10.1016/0304-8853(83)90465-1
Popis: Magnetic thin films of Ni 79 Fe 21 (permalloy) alternated with Cu were prepared by ion beam sputtering. Electrostatic deflection of the Ar + beam between two targets yields a layered structure. This is evidenced from the X-ray diffractograms which show satellites at intervals corresponding to the superstructure wavelength. FMR measurements show a resonance corresponding to the expected uniform mode, as well as a weak complicated spectrum at higher fields. The latter is connected with an imperfect layer structure.
Databáze: OpenAIRE