Surface Modification of Silver Thin Films Using Low Power Chlorine Plasmas
| Autor: | Eric McAdams, Paul Maguire, Céline Escoffier, James McLaughlin |
|---|---|
| Rok vydání: | 2001 |
| Předmět: |
Auger electron spectroscopy
Materials science General Chemical Engineering Binding energy Analytical chemistry Plasma Electrochemistry Chamber pressure X-ray photoelectron spectroscopy Surface modification General Materials Science Electrical and Electronic Engineering Physical and Theoretical Chemistry Thin film |
| Zdroj: | Electrochemical and Solid-State Letters. 4:H31 |
| ISSN: | 1099-0062 |
| DOI: | 10.1149/1.1414942 |
| Popis: | Modification of silver thin films to create Ag/AgCl thin film electrodes, using a plasma process, was investigated and the efficiency of the plasma technique was assessed. X-ray photoelectron spectroscopy measurements revealed the presence of AgCl within the thin film after plasma treatment. The observed binding energy peak shifts corroborated with values found in literature. Auger spectroscopy depth analysis showed that, under low input power conditions, the plasma process is controlled by the chlorine flow and the chamber pressure. The quantity of Cl integrated into the silver matrix increased with increasing chamber pressure. ©2001 The Electrochemical Society. All rights reserved. |
| Databáze: | OpenAIRE |
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