Fabrication and application of polymer coated cantilevers as gas sensors
| Autor: | M. Maute, S. Raible, Udo Weimar, Dieter P. Kern, F. E. Prins, Wolfgang Göpel |
|---|---|
| Rok vydání: | 1999 |
| Předmět: |
chemistry.chemical_classification
Cantilever Fabrication Polydimethylsiloxane Chemistry business.industry Analytical chemistry Resonance Polymer Condensed Matter Physics Atomic and Molecular Physics and Optics Surfaces Coatings and Films Electronic Optical and Magnetic Materials Crystal chemistry.chemical_compound Optoelectronics Electrical and Electronic Engineering Absorption (chemistry) business Layer (electronics) |
| Zdroj: | Microelectronic Engineering. 46:439-442 |
| ISSN: | 0167-9317 |
| DOI: | 10.1016/s0167-9317(99)00128-8 |
| Popis: | We have fabricated SiN"x cantilevers which can be used for applications as miniaturized gas sensors. Cantilevers were coated with polydimethylsiloxane as a chemically sensitive layer and the additional mass loading by the absorption of gas molecules was detected by measuring the change of the resonance frequency of the structures. For the detection of n-octane a sensitivity of -0.099 Hz/ppm is obtained. This value is comparable to the sensitivity of conventional quartz crystal microbalances. The simultaneous detection of the resonance frequencies of different cantilevers for analyzing a gas mixture is demonstrated. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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