Markers prepared by focus ion beam technique for nanopositioning procedures
| Autor: | M. Niebelschütz, Lothar Spiess, V. Cimalla, Henry Romanus, J. Schadewald, T. Machleidt, K. H. Franke, Oliver Ambacher |
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| Rok vydání: | 2007 |
| Předmět: |
Mesoscopic physics
Nanostructure Materials science Ion beam business.industry Coordinate system Nanotechnology Condensed Matter Physics Sample (graphics) Atomic and Molecular Physics and Optics Surfaces Coatings and Films Electronic Optical and Magnetic Materials Optics Electrical and Electronic Engineering Well-defined business Focus (optics) Nanoscopic scale |
| Zdroj: | Microelectronic Engineering. 84:524-527 |
| ISSN: | 0167-9317 |
| Popis: | Positioning on the nanometer scale with replaceable nanotools requires well defined positioning marks to restore the coordinate system with nanoscale accuracy. In this work we propose such patterns (references, markers) consisting of self-organized surfaces and hierarchic patterns written by the focus ion beam (FIB) technique. These patterns are realized either by a deposition of platinum or by cuts with different width, length, height and/or depth. The hierarchic patterns allow the use of automatic search routines for the recovery of the coordinate system on a sample surface. These patterns contain relative large markers for optical detection and are refined down to the nanoscale level. Finally, mesoscopic, self-organized features within these FIB written patterns enables an accurate positioning of the probe on the sample with nanoscale accuracy. |
| Databáze: | OpenAIRE |
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