| Autor: | Gianni Taraschi, Matthew T. Currie, Christopher W. Leitz, Arthur J. Pitera, Z. Y. Cheng, Michael E. Groenert, Eugene A. Fitzgerald, Vicky K. Yang |
|---|---|
| Rok vydání: | 2002 |
| Předmět: |
Materials science
business.industry Optical link Condensed Matter Physics Epitaxy Atomic and Molecular Physics and Optics Electronic Optical and Magnetic Materials law.invention Optics law Optoelectronics Metalorganic vapour phase epitaxy Electrical and Electronic Engineering Thin film Dislocation business Waveguide Light-emitting diode Diode |
| Zdroj: | Journal of Materials Science: Materials in Electronics. 13:377-380 |
| ISSN: | 0957-4522 |
| DOI: | 10.1023/a:1016006824115 |
| Popis: | Working optical links epitaxially grown by atmospheric MOCVD and fabricated on Si via SiGe virtual substrates are demonstrated for the first time. The SiGe virtual substrates are graded from Si substrates to 100% Ge. Because of the 0.07% lattice mismatch between GaAs and Ge, high-quality GaAs-based thin films with threading dislocation densities |
| Databáze: | OpenAIRE |
| Externí odkaz: |
|
Full text from SpringerLink