Laser Micromilling Technology as a Key for Rapid Ceramic MEMS Devices
| Autor: | Anastasiya Gorshkova, Maya Etrekova, K.Yu. Oblov, Nikolay Samotaev |
|---|---|
| Rok vydání: | 2019 |
| Předmět: |
Microelectromechanical systems
Physics Nuclear and High Energy Physics 010308 nuclear & particles physics Mechanical engineering Mems sensors Laser 01 natural sciences Atomic and Molecular Physics and Optics law.invention Form factor (design) law visual_art 0103 physical sciences visual_art.visual_art_medium Ceramic 010306 general physics |
| Zdroj: | Physics of Atomic Nuclei. 82:1508-1512 |
| ISSN: | 1562-692X 1063-7788 |
| Popis: | The flexible laser micromilling technology for ceramic MEMS production of microhotplates in the surface mount device (SMD) package is described. Current results demonstrate that using described technology makes it possible to manufacture all parts of MEMS sensor in the SMD with form factor of SOT-23 package type. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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