Morphology regulation of TiO2 thin film by ALD growth temperature and its applications to encapsulation and light extraction
| Autor: | Yan Qun, Jie Sun, Xiongtu Zhou, Weng Yalian, Chaoxing Wu, Sihua Que, Tailiang Guo, Xiaocong Lai, Yongai Zhang, Guixiong Chen |
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| Rok vydání: | 2020 |
| Předmět: |
010302 applied physics
Anatase Materials science Tio2 particle Tio2 nanoparticles Photoelectric effect Condensed Matter Physics 01 natural sciences Atomic and Molecular Physics and Optics Electronic Optical and Magnetic Materials Amorphous solid Atomic layer deposition Chemical engineering 0103 physical sciences Photocatalysis Electrical and Electronic Engineering Thin film |
| Zdroj: | Journal of Materials Science: Materials in Electronics. 31:21316-21324 |
| ISSN: | 1573-482X 0957-4522 |
| DOI: | 10.1007/s10854-020-04643-6 |
| Popis: | As a multi-functional material, TiO2 thin film has been widely studied and applied in display, photocatalysis, solar cells and other fields. In this work, TiO2 thin films were prepared using atomic layer deposition, and their morphology was successfully regulated by the growth temperature. It was found that TiO2 film prepared at low temperature was amorphous, uniform and dense, with great barrier property, which can be used for encapsulation. Crystalline TiO2 nanoparticles with anatase phase appeared at higher temperature than 150 °C, whose amount increased with the growth temperature. The crystalline TiO2 particles can be used as templates to prepare randomly textured nano-patterns, which were proved to be able to improve the light extraction efficiency of photoelectric devices. Specifically, the luminance efficiency of the QLED with the nano-patterns formed by the crystalline TiO2 particle prepared at 200 °C and 250 °C were increased by 24.07% and 30.44%, respectively. |
| Databáze: | OpenAIRE |
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