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Organic polymer thin films deposited by sputtering using polytetrafluoroethylene (PTFE) and polyimide (PI) targets were investigated with Fourier Transform Infrared Spectroscopy (FTIR), X-ray Photoelectron Spectroscopy (XPS), and Scanning Electron Microscopy (SEM). Films deposited from the PTFE target were poly-hydro-fluoro-carbon. The thin films showed water repellency with an H 2 O contact angle of about 110° and were transparent in the visible region. C–F combination states in the films were similar to those of bulk PTFE. Films deposited from the PI target were found to contain C–N bonds and were harder than bulk PI. The color of thin films was dark brown, showing the existence of C–N bonds, such as those in imide and/or amide groups. However, the combination states characterized by FTIR and XPS analyses were considerably different from those of bulk PI. The difference in chemical composition and combination states between the films deposited from PTFE and PI is thought to result from the difference in types of particles sputtered from the targets; in the case of PTFE sputtering, less C–F bonds are broken by collision of Ar ions for sputtering, whereas in the case of PI sputtering, C–H and C–C bonds are broken by collision of Ar ions. |
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