Surface Acoustic Waves: A New Tool for Thin-Film Research and Sensor Technology

Autor: M. v. Schickfus, S. Hunklinger, R. Hübner
Rok vydání: 1993
Předmět:
Zdroj: Springer Series in Solid-State Sciences ISBN: 9783642848902
Popis: For a long time the investigation of materials with ultrasonic waves has been a well established technique. The potential of this method resides in the fact that it is sensitive to small variations in mass density or of the elastic constants of the material to be investigated. With ultrasonic techniques structural inhomogeneities can be reliably detected. Another application of ultrasonic devices is that of a microbalance. With this device, generally a disk-shaped piezoelectric resonator, the thickness or mass of thin layers on the surface can be measured. This technique relies on the influence of the surface layer on the resonant frequency of the device. If the thickness of the layer is small with respect to the acoustic wavelength, this effect depends linearly on the mass and on the elastic properties of the layer.
Databáze: OpenAIRE