Copper Deposition and Subsequent Grain Structure Evolution in Narrow Lines
| Autor: | Karen Maex, Jan D'Haen, Iwan Vervoort, Sywert Brongersma, Kris Vanstreels, Ward De Ceuninck |
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| Rok vydání: | 2003 |
| Předmět: | |
| Zdroj: | Materials Science Forum. :2485-2490 |
| ISSN: | 1662-9752 |
| DOI: | 10.4028/www.scientific.net/msf.426-432.2485 |
| Popis: | IMEC, B-3001 Heverlee, Belgium. IMOMEC, B-3590 Diepenbeek, Belgium. Katholieke Univ Leuven, EE Dept, Louvain, Belgium.Brongersma, SH, IMEC, Kapeldreef 75, B-3001 Heverlee, Belgium. |
| Databáze: | OpenAIRE |
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