Electrical isolation of radio‐frequency plasma discharges

Autor:	Paul A. Miller, Michael P. Splichal, Harold M. Anderson
Rok vydání:	1992
Předmět:	Signal generator Chemistry business.industry Analytical chemistry General Physics and Astronomy Plasma Physics::Plasma Physics Harmonics Physics::Space Physics High harmonic generation Optoelectronics Microelectronics Electric discharge business Electrical impedance Electronic circuit
Zdroj:	Journal of Applied Physics. 71:1171-1176
ISSN:	1089-7550 0021-8979
DOI:	10.1063/1.351283
Popis:	Plasmas used for processing of microelectronics materials are often powered by radio‐frequency (rf) electrical sources. Such plasmas have nonlinear impedance characteristics which cause the plasma state to depend on the nature of the circuitry that supplies electrical power to the plasma. This dependency occurs because the harmonics of the fundamental drive frequency, which are generated by the plasma nonlinearity, interact with the impedance of the external circuitry at the harmonic frequencies. This report describes the successful use of an rf filter in the power feed to the plasma which isolates the plasma electrically and eliminates its sensitivity to changes in the rf generator, cable plant, and matching network.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::ba91e50ebd1f2c5c978ea8dbfb468208 https://doi.org/10.1063/1.351283 Zobrazit plný text záznamu