| Autor: |
C. Grant Willson, Jin Choi, Daniel A. Babbs, Van N. Truskett, Sidlgata V. Sreenivasan, Frank Y. Xu, Michael Watts, Ecron Thompson, Ian M. Mcmackin, Norman E. Schumaker, Nicholas A. Stacey, Philip D. Schumaker |
| Rok vydání: |
2004 |
| Předmět: |
|
| Zdroj: |
SPIE Proceedings. |
| ISSN: |
0277-786X |
| Popis: |
The Step and Flash Imprint Lithography (S-FILTM) process is a step and repeat nano-replication technique based on UV curable low viscosity liquids. Molecular Imprints, Inc. (MII) develops commercial tools that practice the S-FIL process. This talk will present the imprint materials that have been developed to specifically address the issue of process life and defects. The S-FIL process involves field-to-field dispensing of low viscosity ( |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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