| Autor: |
F. Senf, Frank Siewert, Heiner Lammert, U. Pedersen, Thomas Zeschke, Simon G. Alcock, Stewart Scott, T. Noll, Rob Walton, Kawal Sawhney |
| Rok vydání: |
2010 |
| Předmět: |
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| Zdroj: |
Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment. 616:224-228 |
| ISSN: |
0168-9002 |
| DOI: |
10.1016/j.nima.2009.10.137 |
| Popis: |
We present design and implementation details of the Diamond-NOM (nanometre optical metrology)—a non-contact profiler capable of measuring the surface topography of large (up to 1500 mm long) and heavy (up to 150 kg) optical assemblies with sub-nanometre resolution and repeatability. These levels of performance are essential to fabricate and optimize next generation optics. The capabilities of the Diamond-NOM have already enabled collaborations with optic manufacturers, including production of a preferentially deposited, large (1.2 m), synchrotron mirror with a slope error of ∼0.44 μrad rms and using bimorph technology to reduce figure error of a super-polished (elastic emission machining) optic to |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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Full Text from ScienceDirect