P-PW-04 TRIAL OF NANO-METER ORDER POSITIONING BY OPEN-LOOP DRIVE OF PIEZOELECTRIC ACTUATOR

Autor:	Nobuhiko Henmi, Michihiko Tanaka, Youichi Kubo, Takeru Yamashita
Rok vydání:	2003
Předmět:	Materials science Piezoelectric motor Order (business) Control theory Open-loop controller Nanometre General Medicine Piezoelectric actuators
Zdroj:	Proceedings of JSME-IIP/ASME-ISPS Joint Conference on Micromechatronics for Information and Precision Equipment : IIP/ISPS joint MIPE. 2003:407-408
ISSN:	2424-3132
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::ba3f309895c1c3098154eed27b1049b8 https://doi.org/10.1299/jsmemipe.2003.407 Zobrazit plný text záznamu