4485234 Method of preparing polyamide acid for processing of semiconductors
| Autor: | Daisuke Makino, Yasuo Miyadera |
|---|---|
| Rok vydání: | 1985 |
| Předmět: |
Materials science
Semiconductor Chemical engineering business.industry Polyamide Organic chemistry Electrical and Electronic Engineering Safety Risk Reliability and Quality Condensed Matter Physics business Atomic and Molecular Physics and Optics Surfaces Coatings and Films Electronic Optical and Magnetic Materials |
| Zdroj: | Microelectronics Reliability. 25:601-602 |
| ISSN: | 0026-2714 |
| DOI: | 10.1016/0026-2714(85)90373-7 |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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