Three-dimensional micro self-assembly using bridging flocculation
| Autor: | T. Nakakubo, Isao Shimoyama |
|---|---|
| Rok vydání: | 2000 |
| Předmět: |
Microelectromechanical systems
Flocculation Materials science Anisotropic etching Bridging (networking) Polyacrylamide Metals and Alloys Nanotechnology Rate equation Condensed Matter Physics Microstructure Surfaces Coatings and Films Electronic Optical and Magnetic Materials chemistry.chemical_compound chemistry Self-assembly Electrical and Electronic Engineering Composite material Instrumentation |
| Zdroj: | Sensors and Actuators A: Physical. 83:161-166 |
| ISSN: | 0924-4247 |
| DOI: | 10.1016/s0924-4247(00)00355-1 |
| Popis: | This paper describes three-dimensional (3D) self-assembling microstructures. Bridging flocculation of PAAM (polyacrylamide) is used as a bonding force. The microstructures are made of Si. An Al2O3 layer is deposited on a part of the surfaces for connection. By controlling the pH of the system, the bonding force acts only between the surfaces of Si and Al2O3. Therefore, the convex area can be connected to the concave one when they collide. These structures are fabricated mainly by oxidation and KOH anisotropic etching. We also demonstrate that the behavior of the self-assembling system can be described by chemical formulae and analyzed by rate equations. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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