Development of an X-ray photoelectron microscopic system with a compact X-ray source

Autor:	CHIEMI FUJIKAWA, NAOHIRO YAMAGUCHI, TADAYUKI OHCHI, TAMIO HARA, KATSUMI WATANABE, IBUKI TANAKA, MASAMI TAGUCHI
Rok vydání:	2002
Předmět:	Electrical and Electronic Engineering Condensed Matter Physics Atomic and Molecular Physics and Optics
Zdroj:	Laser and Particle Beams. 20:39-42
ISSN:	1469-803X 0263-0346
Popis:	We have constructed an X-ray photoelectron microscopic system. An X-ray source is a laser-produced plasma in a scheme of an X-ray laser experiment. X rays involving amplified spontaneous emissions (ASE) at 15.47 nm were delivered with a 10-Hz repetition rate from a compact X-ray laser system. X rays were collected and focused by a Schwarzschild optics coated with Mo/Si multilayers for a 15.47-nm X ray. Photoelectron signals due to the Ga 3d and As 3d electrons were observed, when a GaAs wafer was used as a sample. The spatial resolution of about 1 μm was confirmed.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::b9bf6d64c00ca5782b6773dbefb73470 https://doi.org/10.1017/s0263034602201056 Zobrazit plný text záznamu