Volatile detection system using piezoelectric micromechanical resonators interfaced by an oscillator readout
| Autor: | Mercedes Crego-Calama, M. Vandecasteele, Violeta Petrescu, Mihai Patrascu, Devrez Mehmet Karabacak, Sywert Brongersma, C. Van Hoof, Julia Pettine |
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| Rok vydání: | 2013 |
| Předmět: |
Microelectromechanical systems
Time delay and integration Materials science business.industry System of measurement Amplifier Metals and Alloys Condensed Matter Physics Piezoelectricity Surfaces Coatings and Films Electronic Optical and Magnetic Materials Resonator Electronic engineering Optoelectronics Electrical and Electronic Engineering Allan variance business Instrumentation Sensitivity (electronics) |
| Zdroj: | Sensors and Actuators A: Physical. 189:496-503 |
| ISSN: | 0924-4247 |
| DOI: | 10.1016/j.sna.2012.11.003 |
| Popis: | In this paper, we demonstrate the implementation of a real-time volatile detection system using an electronic readout interfacing a functionalized piezoelectric micromechanical resonator for frequency shift tracking. The readout circuit is based on a trans-impedance sustaining amplifier and it is assembled from off-the-shelf components. The 2.08 MHz oscillator system achieves a measured Allan deviation of 3 Hz at 10 ms integration time. Exposure to varying concentrations of ethanol in a controlled dry nitrogen flow yielded a normalized sensitivity of −7.48 × 10 −6 ppm −1 . These results pave the way toward compact and portable measurement systems capable of ppm-level detection resolution for low-molecular weight volatile compounds. |
| Databáze: | OpenAIRE |
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