Blue Femtosecond Laser-Induced Crystallization of Amorphous Silicon
| Autor: | Kuan-Wen Chen, Ci-Ling Pan, Po-Hsun Wu, Yi-Chao Wang, Shih-Hsuan Kao |
|---|---|
| Rok vydání: | 2020 |
| Předmět: |
Amorphous silicon
Materials science Annealing (metallurgy) business.industry 02 engineering and technology 021001 nanoscience & nanotechnology Laser 01 natural sciences Fluence Grain size law.invention 010309 optics chemistry.chemical_compound chemistry law 0103 physical sciences Femtosecond Sapphire Optoelectronics Crystallization 0210 nano-technology business |
| Zdroj: | Conference on Lasers and Electro-Optics. |
| DOI: | 10.1364/cleo_at.2020.jtu2b.9 |
| Popis: | Amorphous silicon was crystallized using a blue ultrafast Ti:Sapphire laser system. Polysilicon with average grain size of 280 nm was achieved with fluence 30 of mJ/cm2 and overlapping of 93.75% at room temperature. |
| Databáze: | OpenAIRE |
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