Selected‐Area Nucleation and Patterning of Diamond Thin Films by Electrophoretic Seeding
| Autor: | J. L. Valdes, H. Huggins, J. A. Mucha, L. Seibles, J. W. Mitchel |
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| Rok vydání: | 1991 |
| Předmět: |
Materials science
Silicon Renewable Energy Sustainability and the Environment Scanning electron microscope business.industry Nucleation chemistry.chemical_element Diamond Nanotechnology Substrate (electronics) engineering.material Condensed Matter Physics Surfaces Coatings and Films Electronic Optical and Magnetic Materials Optics chemistry Materials Chemistry Electrochemistry engineering Seeding Thin film business Lithography |
| Zdroj: | Journal of The Electrochemical Society. 138:635-636 |
| ISSN: | 1945-7111 0013-4651 |
| Popis: | We demonstrate here an electrophoretic process for nucleating and patteming of silicon substrates for CVD of polycrystalline diamond films that is simpler than present methods and far less damaging to the underlying substrate |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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