Characterization of low temperature synthesized hexagonal diamond thin films
| Autor: | Kyungnam Kang, Yoonyoung Jin, Pratul K. Ajmera, Jeonghwan Kim |
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| Rok vydání: | 2014 |
| Předmět: |
congenital
hereditary and neonatal diseases and abnormalities Materials science genetic structures Band gap Material properties of diamond Analytical chemistry Diamond Nanotechnology Chemical vapor deposition engineering.material Condensed Matter Physics Electronic Optical and Magnetic Materials body regions Carbon film Hardware and Architecture hemic and lymphatic diseases parasitic diseases Tauc plot engineering Wafer Nanoindenter Electrical and Electronic Engineering |
| Zdroj: | Microsystem Technologies. 21:1395-1400 |
| ISSN: | 1432-1858 0946-7076 |
| DOI: | 10.1007/s00542-014-2196-6 |
| Popis: | Characterization of hexagonal diamond thin films synthesized by photo-enhanced chemical vapor deposition method at 450 °C on Al/Ni coated thermally oxidized Si wafer substrates is reported here. Measurements of optical, electrical and mechanical properties of synthesized hexagonal diamond films are reported for the first time. Optical band gap of the hexagonal diamond film is approximately 1.0 eV as obtained from the Tauc plot utilizing UV---Visible spectroscopy. Nanoindenter is utilized for I---V and reduced modulus measurements on the hexagonal diamond films. |
| Databáze: | OpenAIRE |
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