Stable MEMS electrostatic comb-driven scanning mirror via feedback of comb electrostatic capacitance
| Autor: | Renshi Sawada, Koji Okazaki, Noriaki Ishikawa, Ayumu Kudo |
|---|---|
| Rok vydání: | 2016 |
| Předmět: |
Microelectromechanical systems
Scanner Materials science business.industry Voltage control 02 engineering and technology 021001 nanoscience & nanotechnology Electrostatics 01 natural sciences Capacitance Optical reflection 010309 optics Optics 0103 physical sciences Electrode Scanning mirror 0210 nano-technology business |
| Zdroj: | 2016 International Conference on Optical MEMS and Nanophotonics (OMN). |
| DOI: | 10.1109/omn.2016.7565866 |
| Popis: | This paper reports a stable electrostatic comb-driven scanner detecting electrostatic capacitance between the comb-shaped electrodes of mirror and the detecting electrodes, and feeding it back to the drive signals applied to the driving electrodes. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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