Synthesis and Electrical Characterization of BaTiO3 Thin Films on Si(100)

Autor:	S.A. Ghosh, G.N. Chaudhari, Vijay Ramkrishna Chinchamalatpure
Rok vydání:	2010
Předmět:	Diffraction Materials science Scanning electron microscope Analytical chemistry Substrate (electronics) engineering.material law.invention Characterization (materials science) Crystallinity Coating law engineering Calcination Thin film
Zdroj:	Materials Sciences and Applications. :187-190
ISSN:	2153-1188 2153-117X
DOI:	10.4236/msa.2010.14029
Popis:	BaTiO3 thin film has been deposited on Si(100) substrate using sol-gel process and deposited by using spin – coating technique. The BaTiO3/Si(100) structures were studied by structural and electrical characteristics. The X-ray diffrac-tion of BaTiO3/Si(100) shows that the diffraction peaks become increasing sharp with increasing calcination tempera-tures indicating the enhance crystallinity of the films. Scanning electron microscopy of BaTiO3 thin films shows the crack free and uniform nature. The capacitance-voltage measurement of BaTiO3 thin film deposited on Si(100) an-nealed at 600℃ shows large frequency dispersion in the accumulation region. The current-voltage measurement of BaTiO3/Si shows the ideality factor was approaches to unity at 600℃.
Databáze:	OpenAIRE
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