Development of thermal actuators with multi-locking positions

Autor:	Andrew J. Flewitt, Yong Qing Fu, Y Zhu, S.M. Spearing, Jikui Luo, J M Miao, William I. Milne
Rok vydání:	2006
Předmět:	History Materials science business.industry Mechanical engineering Structural engineering Bending Microstructure Computer Science Applications Education Power (physics) Thermal Deformation (engineering) business Electroplating Actuator Electromechanics
Zdroj:	Journal of Physics: Conference Series. 34:794-799
ISSN:	1742-6596 1742-6588
DOI:	10.1088/1742-6596/34/1/131
Popis:	To reduce power consumption and operation temperature for micro-thermal actuators, metal-based micro-mechanical locks with multi-locking positions were analyzed and fabricated. The micro-locks consist of two or three U-shaped thermal actuators. The devices were made by a single mask process using electroplated Ni as the active material. Tests showed that the metal based thermal actuators deliver a maximum displacement of ~20?m at a much lower temperature than that of Si-based actuators. However Ni-actuators showed a severe back bending, which increases with increasing applied power. The temperature to initiate the back bending is as low as ~240?C. Back bending increases the distance between the two actuators, and leads to locking function failure. For practical application, Ni-based thermal actuators must be operated below 200?C.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::b9035bd47c523af9ce6d604acf3dcdd6 https://doi.org/10.1088/1742-6596/34/1/131 Zobrazit plný text záznamu