Experimental study on main pulse power supply for dicharge produced plasma extreme ultraviolet source

Autor:	赵永蓬 Zhao Yongpeng, 贾兴 Jia Xing, 张潮海 Zhang Chaohai, 刘春芳 Liu Chunfang, 王骐 Wang Qi, 吕鹏 Lü Peng
Rok vydání:	2010
Předmět:	Pulse power supply Materials science Optics business.industry Extreme ultraviolet Plasma Electrical and Electronic Engineering business Atomic and Molecular Physics and Optics
Zdroj:	High Power Laser and Particle Beams. 22:388-392
ISSN:	1001-4322
DOI:	10.3788/hplpb20102202.0388
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::b8fd6395e3e90e5ab8a487c0eca3499f https://doi.org/10.3788/hplpb20102202.0388 Zobrazit plný text záznamu