3D modelling of MEMS components for coupled elastic - electrostatic characterization

Autor:	O. Sorasen, A. Vogl, null Xuyuan Chen, L. Furuberg, K.M. Johansen
Rok vydání:	2004
Zdroj:	Proceedings. 2004 International Conference on MEMS, NANO and Smart Systems, 2004. ICMENS 2004..
DOI:	10.1109/icmens.2004.1332356
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::b8e3fb1bb00d588be122b664d0998739 https://doi.org/10.1109/icmens.2004.1332356 Zobrazit plný text záznamu