| Autor: |
Alexander H. Slocum, Akinori Yui, Go Okahata, Shigeki Okuyama, Hirotsugu Saito, Takayuki Kitajima |
| Rok vydání: |
2014 |
| Předmět: |
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| Zdroj: |
Advanced Materials Research. 1017:604-609 |
| ISSN: |
1662-8985 |
| Popis: |
There is a compelling need for development of a surface grinding machine for 450mm diameter silicon-wafers. The authors have developed a new surface grinding machine for the large scale silicon-wafers. The machine has a rotary work table equipped with a constant-flow hydrostatic water bearing. The table system has to attain high static stiffness to achieve higher loop stiffness. This paper investigates static performances of the rotary table by numerical computation. The obtained results are compared with the experimental ones. Accordingly, it is verified that the developed rotary table has sufficient static performances for the large scale silicon-wafer grinding machine. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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