A Method to Measure Beam Deflections in Different Resonance Modes Piezoresistively and its Incorporation into 2D Optical Microscanners

Autor:	Alexis Debray, Tarik Bourouina, Akira Asaoka, Hiroyuki Fujita, Eric Lebrasseur, Hideo Muro, Gilbert Reyne, Takahiko Oki
Rok vydání:	2007
Předmět:	Microelectromechanical systems Engineering Signal processing Cantilever business.industry Mechanical Engineering Acoustics Microscanner Torsion (mechanics) Piezoresistive effect Vibration Electronic engineering Bridge circuit Electrical and Electronic Engineering business
Zdroj:	IEEJ Transactions on Sensors and Micromachines. 127:31-36
ISSN:	1347-5525 1341-8939
Popis:	This paper describes a sensing technique to detect beam deflections caused by the two different vibration modes, i.e. bending and torsion modes of a micro cantilever, separately with two piezoresistor bridge circuits. Fabrication process to incorporate this detection circuitry into a two-dimensional optical microscanner together with the signal processing circuitry for self-sustaining vibrations are presented, which enables a compact feedback control of the two-dimensional optical scanning. Prototype optical scanners with this detection circuitry and magnetostirictive actuation have been fabricated with MEMS technology and tested to verify this technology.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::b8ab1f307f39707a334e6e880b3f2dc6 https://doi.org/10.1541/ieejsmas.127.31 Zobrazit plný text záznamu