Synthesis, structural and nanomechanical properties of cobalt based thin films
| Autor: | Costas A. Charitidis, Vasiliki Tsikourkitoudi, Nikolaos Papadopoulos, Vassileios Markakis, Elias P. Koumoulos, Ioannis A. Kartsonakis, Evangelos Hristoforou |
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| Rok vydání: | 2015 |
| Předmět: |
Materials science
Mechanical Engineering Metallurgy Layer by layer chemistry.chemical_element Chemical vapor deposition Nanoindentation Combustion chemical vapor deposition chemistry.chemical_compound Carbon film chemistry Chemical engineering Mechanics of Materials Cobalt boride Thin film Cobalt Civil and Structural Engineering |
| Zdroj: | International Journal of Structural Integrity. 6:225-242 |
| ISSN: | 1757-9864 |
| DOI: | 10.1108/ijsi-10-2013-0031 |
| Popis: | Purpose – The purpose of this paper is to produce cobalt (Co)-based thin films by metalorganic chemical vapor deposition (CVD) technique and then to evaluate structural and mechanical integrity. Design/methodology/approach – Co-based thin films were produced by metalorganic CVD technique. Boronizing, carburization and nitridation of the produced Co thin films were accomplished through a post-treatment stage of thermal diffusion into as-deposited Co thin films, in order to produce cobalt boride (Co2B), cobalt carbide and cobalt nitride thin films in the surface layer of Co. The surface topography and the crystal structure of the produced thin films were evaluated through scanning electron microscopy and X-ray diffraction, respectively. The mechanical integrity of the produced thin films was evaluated through nanoindentation technique. Findings – The obtained results indicate that Co2B thin film exhibits the highest nanomechanical properties (i.e. H and E), while Co thin film has enhanced plasticity. The cobalt oxide thin film exhibits higher resistance to wear in comparison to the cobalt thin film, a fact that is confirmed by the nanoscratch analysis showing lower coefficient of friction for the oxide. Originality/value – This work is original. |
| Databáze: | OpenAIRE |
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