Novel Estimation Method for Dielectric Loss Quality Factor in Composite SOI/PZT Devices

Autor:	Vishnu Kumar, Sudhanshu Tiwari, Shreeraj Joshi, Saurabh Arun Chandorkar
Rok vydání:	2022
Zdroj:	2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS).
DOI:	10.1109/mems51670.2022.9699467
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::b82b046a962e1357797989de7052fe33 https://doi.org/10.1109/mems51670.2022.9699467 Zobrazit plný text záznamu