Self‐consistent dc glow‐discharge simulations applied to diamond film deposition reactors

Autor:	Maheswaran Surendra, L. S. Plano, David B. Graves
Rok vydání:	1992
Předmět:	Glow discharge Hydrogen Analytical chemistry General Physics and Astronomy Diamond chemistry.chemical_element Chemical vapor deposition engineering.material Ion Anode symbols.namesake chemistry symbols engineering Langmuir probe Plasma diagnostics Atomic physics
Zdroj:	Journal of Applied Physics. 71:5189-5198
ISSN:	1089-7550 0021-8979
DOI:	10.1063/1.350575
Popis:	Self‐consistent particle‐fluid hybrid simulations have been used to study the structure of hydrogen dc discharges between parallel plates. A Monte Carlo simulation is used to describe individual energetic electrons in the cathode sheath, while the electrons and ions in the low‐field region of the discharge are modeled as a fluid. Simulation results for pure H2 discharges at conditions typical in diamond growth (approximately 20–30 Torr at 1000 K, 100–200 A m−2) are in reasonable agreement with optical emission and Langmuir probe measurements. The space potential in these discharges is negative with respect to the anode, unlike comparable discharges at lower pressures. Anode glows are predicted by the simulation and are observed experimentally. Dissociation of H2 in the anode region contributes significantly to the flux of atomic hydrogen to the anode, where diamond is typically grown.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::b81711140ce7a30c04d743f29dd97d2c https://doi.org/10.1063/1.350575 Zobrazit plný text záznamu