Guest Editorial Special Section on Microelectronics Manufacturing: Prosperity and Environmental Stewardship
| Autor: | S.P. Beaudoin, R.M. Content, L. Losey, F. Shadman |
|---|---|
| Rok vydání: | 2004 |
| Předmět: |
Chemical technology
Engineering business.industry media_common.quotation_subject Condensed Matter Physics Environmental stewardship Industrial and Manufacturing Engineering Manufacturing engineering Electronic Optical and Magnetic Materials Manufacturing Special section Advanced manufacturing Microelectronics Prosperity Electrical and Electronic Engineering business media_common |
| Zdroj: | IEEE Transactions on Semiconductor Manufacturing. 17:481-482 |
| ISSN: | 0894-6507 |
| DOI: | 10.1109/tsm.2004.837000 |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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