Excimer laser beam homogenizer with low divergence

Autor:	K. Jasper, R. Senczuk, H. Hügel, Peter Berger, H.-J. Kahlert, S. Scheede, B. Burghardt
Rok vydání:	1999
Předmět:	Beam diameter Materials science business.industry General Chemistry Beam parameter product law.invention Optics law Physics::Accelerator Physics Homogenizer Optoelectronics General Materials Science M squared Laser beam quality business Beam homogenizer Beam (structure) Gaussian beam
Zdroj:	Applied Physics A: Materials Science & Processing. 69:S315-S318
ISSN:	1432-0630 0947-8396
DOI:	10.1007/s003390051407
Popis:	A new beam homogenizer device which leaves the beam parameter product almost unaffected is presented. Excimer laser beams usually show a nearly Gaussian beam profile along the short beam axis whereas along the long beam axis a nearly flat-top profile is provided. The new beam homogenizer efficiently converts the short beam axis into a top-hat profile featuring nearly the same divergence as the incoming laser beam. Depending on the output beam profile of the excimer laser the homogenizer presented provides a beam profile with a homogeneity of ±5% to ±10% within an area covering 65% to 70% of the total pulse energy.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::b7cad60e10626b653b7d7361abd7c9c1 https://doi.org/10.1007/s003390051407 Zobrazit plný text záznamu Plný text ve formátu PDF