Machine vision system for alignment in die-to-wafer bonder
| Autor: | Jiyoung Chu, Minhwan Seo, Hyungjin Kim, Wondon Joo, Sungmin Ahn, Sangwoo Bae |
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| Rok vydání: | 2022 |
| Zdroj: | Optical System Alignment, Tolerancing, and Verification XIV. |
| Databáze: | OpenAIRE |
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