Ultralow-Supersaturation Al Pretreatment toward Low Dislocation Density and Low Radio Frequency Loss GaN/AlN Epi-Stacks on High-Resistivity Si Substrates
| Autor: | Zidong Cai, Xuelin Yang, Cheng Ma, Zhenghao Chen, Danshuo Liu, Liwen Sang, Fujun Xu, Xinqiang Wang, Weikun Ge, Bo Shen |
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| Rok vydání: | 2022 |
| Předmět: | |
| Zdroj: | ACS Applied Electronic Materials. 4:4113-4118 |
| ISSN: | 2637-6113 |
| DOI: | 10.1021/acsaelm.2c00747 |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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