A Quantitative Study of CVD Graphene on Synthesis Parameters and Sheet Resistance

Autor: Lu Ju, Hao Chen, Ming-Yang Geng, Zhen-Guo Liu, Wei-Bing Lu, Bu-Yun Yu
Rok vydání: 2021
Předmět:
Zdroj: 2021 IEEE 4th International Conference on Electronic Information and Communication Technology (ICEICT).
DOI: 10.1109/iceict53123.2021.9531099
Popis: In this paper, a systematic study on the growth process of CVD graphene was conducted. Then the optimized growth parameters of CVD graphene were obtained through orthogonal experiment. And the direct corresponding relationship between growth parameters and the sheet resistance of graphene band was given by parametric comparison experiment and formula fitting. The result in this paper established a bridge between basic research and application of graphene in microwave band.
Databáze: OpenAIRE