A Flexible Cluster Tool Simulation Framework with Wafer Batch Dispatching Time Recommendation

Autor:	Hsin-Ping Yen, Shiuan-Hau Huang, Yan-Hsiu Liu, Kuang-Hsien Tseng, Ji-Fu Kung, Yi-Ting Li, Yung-Chih Chen, Chun-Yao Wang
Rok vydání:	2023
Zdroj:	2023 24th International Symposium on Quality Electronic Design (ISQED).
DOI:	10.1109/isqed57927.2023.10129375
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::b76e16168b65aa9cf673aba6a3d40b14 https://doi.org/10.1109/isqed57927.2023.10129375 Zobrazit plný text záznamu