3-D Integration and ESD Protection: Design and Analysis

Autor: Souvick Mitra, You Li, Robert Gauthier, Gebreselasie Ephrem G, Thuy Tran-quinn, Koushik Ramachandran
Rok vydání: 2016
Předmět:
Zdroj: IEEE Transactions on Device and Materials Reliability. 16:497-503
ISSN: 1558-2574
1530-4388
DOI: 10.1109/tdmr.2016.2627522
Popis: A set of design of experiments matrix was created to evaluate the possibilities of electrostatic-discharge (ESD) failures during the complex 3-D integration process as a function of the ESD protection level. A detailed set of pass/fail criteria based on circuit performance was established. Various phases of 3-D integration are monitored for ESD failures. Based on measured samples, it was observed that the functionality test and leakage test show circuit performance degradation and a larger fail rate after chip-to-chip bonding on designs without ESD protection.
Databáze: OpenAIRE