Resolution Limit of Negative Electron Resist Exposed on a Thin Film Substrate
| Autor: | K. Sukegawa, Shungo Sugawara, T. Tamamura |
|---|---|
| Rok vydání: | 1982 |
| Předmět: |
Materials science
Renewable Energy Sustainability and the Environment business.industry Resolution (electron density) Electron Substrate (electronics) Condensed Matter Physics Surfaces Coatings and Films Electronic Optical and Magnetic Materials Resist Materials Chemistry Electrochemistry Optoelectronics Thin film business |
| Zdroj: | Journal of The Electrochemical Society. 129:1831-1835 |
| ISSN: | 1945-7111 0013-4651 |
| DOI: | 10.1149/1.2124303 |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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