Analysis of surfaces, films, and multilayers by resonant laser ablation

Autor:	Chris G. Gill, J. E. Anderson, Clyn Smith, Gregory C. Eiden, P. H. Hemberger, Todd M. Allen, A.W. Garrett, Nicholas S. Nogar, Peter B. Kelly
Rok vydání:	1995
Předmět:	Laser ablation Materials science Spectrometer business.industry medicine.medical_treatment Analytical chemistry Ablation Laser Mass spectrometry law.invention law medicine Optoelectronics Ion trap Thin film Spectroscopy business
Zdroj:	SPIE Proceedings.
ISSN:	0277-786X
DOI:	10.1117/12.206451
Popis:	In this manuscript we review briefly the history of Resonant Laser Ablation (RLA), and discuss some current ideas regarding sample preparation, laser parameters, and mechanisms. We also discuss current applications including spectral analysis of trace components, depth profiling of thin films and multilayer structures, and the use of RLA with the Ion Trap Mass Spectrometer (ITMS).
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::b6fe1006d3e55807f6c1c597d7375aaf https://doi.org/10.1117/12.206451 Zobrazit plný text záznamu